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Wafer Scale Processing |
While most of our
processing is performed at the die level, we have developed a process for
hybridizing and back processing 150 mm wafers. CCD wafers are hybridized
to aluminum nitride ceramic substrates with indium bumps and laser drilled vias
and then thinned as a complete wafer. Backside coating and dicing follow,
yielding fully buttable backside devices which are no larger than the original
CCD die. This represents a true 4-side buttable technology.
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