We mechanically lap wafers prior to probing to
obtain a better cosmetic surface after etching and to reduce the total chemical
etch time during detector thinning.
While we have developed an in-house lapping process for both die and
wafers, we most often use an outside
vendor for wafer lapping.
The final wafer thickness after
lapping is typically 250 microns. Polishing to backside surface is also a
critical process step since it aids in improved cosmetic quality of the final
back illuminated device.