The University of Arizona
Imaging Technology Laboratory
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ITL Technologies

Much of our work is aimed at developing new technologies which benefit astronomy and imaging science in general.  The links below jump to some of the more important of these technologies. Also see our References section for technical papers.

Backside Processing

The process of optimizing a detector for backside illumination in order to improve its quantum efficiency and range of spectral response is referred to as backside processing.  This is the largest area of expertise at ITL and accounts for a significant amount of our effort. Backside processing refers to the sequence of steps required to convert a front illuminated CCD (as fabricated at a semiconductor manufacturer's foundry) into a highly optimized detector suitable for low light level scientific and industrial imaging.  The individual process steps are described below.

Substrates

Substrates provide mechanical and electrical support for hybridized detectors. They are made of either silicon or ceramic. Click here for more information.

Backside Grinding

Click here for more information.

Hybridization

Click here for more information.

Thinning

Click here for more information.

Backside Coatings

Click here for more information.

Dicing

Click here for more information.

Packaging

Click here for more information.

Wafer Probing

We characterize individual die as well as entire lot runs at the wafer level before proceeding with backside processing.  Our tests include DC shorts and opens, AC functionality, cosmetics, CTE, and absolute gain.  We perform these tests as low as -60C. Click here for more information.

Detector Characterization

We have developed software and hardware systems for detector characterization, usually aimed at fully testing CCDs and CMOS imagers for scientific applications. See also our U of A Detector Characterization Program.

Cameras

Cameras are heart of any imaging system and include the detector, dewar, electronic controller, and software.  We are responsible for many cameras at the University of Arizona used for astronomical imaging.  We also produce many cameras for detector characterization in our lab as well as some cameras for other external activities. Click here for more information.

Detector Cleaning

Because of the complex material mixtures used with modern detectors, cleaning them is a difficult task.  We have developed several processes to clean both our detectors while they are being processed and other devices after extended service or when contaminated. Click here for more information.

     
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